. . . "scientific article published on 01 January 2018"@en . "B D Hoskins" . . "Electron beam-based metrology after CMOS"@sq . . . . . . . . . . . "Electron beam-based metrology after CMOS"@sq . . . . . . . "\u043D\u0430\u0443\u0447\u043D\u0430 \u0441\u0442\u0430\u0442\u0438\u044F"@bg . . . . . . . . . "J S Villarrubia" . . . "artikull shkencor i botuar m\u00EB 01 janar 2018"@sq . . . . . . . . . . . . . . . . . . "10.1063/1.5038249" . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . "art\u00EDculo cient\u00EDfico publicado en 2018"@es . . . . . . . "article scientifique (publi\u00E9 2018)"@fr . . . "Electron beam-based metrology after CMOS"@en . . . . "A E Vlad\u00E1r" . . . . . . "30984475" . . "Electron beam-based metrology after CMOS"@nl . . . "6459207" . . "Electron beam-based metrology after CMOS"@sq . . . "Electron beam-based metrology after CMOS"@nl . . "wetenschappelijk artikel"@nl . . . . "6" . . . . . . . "art\u00EDculu cient\u00EDficu espubliz\u00E1u en xineru de 2018"@ast . . . "articolo scientifico (pubblicato il 2018)"@it . . . "artigo cient\u00EDfico (publicado na 2018)"@pt . . . . . "\u043D\u0430\u0443\u043A\u043E\u0432\u0430 \u0441\u0442\u0430\u0442\u0442\u044F, \u043E\u043F\u0443\u0431\u043B\u0456\u043A\u043E\u0432\u0430\u043D\u0430 1 \u0441\u0456\u0447\u043D\u044F 2018"@uk . . . "2018-01-01T00:00:00Z"^^ . . . . . . . . . . "Electron beam-based metrology after CMOS"@en . . . . . . . . . "Electron beam-based metrology after CMOS"@nl . . . . . . . . . . . . "Electron beam-based metrology after CMOS"@en . . . . "Electron beam-based metrology after CMOS"@en . . "im Januar 2018 ver\u00F6ffentlichter wissenschaftlicher Artikel"@de . . . .