. "R. Ferrini" . "\u043D\u0430\u0443\u043A\u043E\u0432\u0430 \u0441\u0442\u0430\u0442\u0442\u044F, \u043E\u043F\u0443\u0431\u043B\u0456\u043A\u043E\u0432\u0430\u043D\u0430 \u0432 \u0431\u0435\u0440\u0435\u0437\u043D\u0456 2004"@uk . . . "J.-P. Chandouineau" . "wetenschappelijk artikel"@nl . "Fabrication of low loss two-dimensional InP photonic crystals by inductively coupled plasma etching"@nl . . "im M\u00E4rz 2004 ver\u00F6ffentlichter wissenschaftlicher Artikel"@de . . "Fabrication of low loss two-dimensional InP photonic crystals by inductively coupled plasma etching"@nl . . "S. Hubert" . . "10.1063/1.1644630" . "Fabrication of low loss two-dimensional InP photonic crystals by inductively coupled plasma etching"@en . . . . . "art\u00EDculu cient\u00EDficu"@ast . . "article scientifique publi\u00E9 en 2004"@fr . . . . "S. Sainson" . . . . . . . "G.-H. Duan" . . . . . . "L. Legou\u00E9zigou" . . . . . . . . . "Fabrication of low loss two-dimensional InP photonic crystals by inductively coupled plasma etching"@en . . . "Fabrication of low loss two-dimensional InP photonic crystals by inductively coupled plasma etching"@en . "B. Lombardet" . "2242-2245" . "S. Fabre" . . "F. Pommereau" . "Fabrication of low loss two-dimensional InP photonic crystals by inductively coupled plasma etching"@en . "Fabrication of low loss two-dimensional InP photonic crystals by inductively coupled plasma etching"@nl . . . . "95" . . "2004-03-01T00:00:00Z"^^ . "5" .