. . "389" . "Characterization and optical investigation of BCN film deposited by RF magnetron sputtering"@en . . . "2001-06-01T00:00:00Z"^^ . . . . "article published in 2001"@en . . . "Characterization and optical investigation of BCN film deposited by RF magnetron sputtering"@en . . . "Characterization and optical investigation of BCN film deposited by RF magnetron sputtering"@en . . "Characterization and optical investigation of BCN film deposited by RF magnetron sputtering"@en . . . . "S.T Lee" . "Characterization and optical investigation of BCN film deposited by RF magnetron sputtering"@nl . . "im Juni 2001 ver\u00F6ffentlichter wissenschaftlicher Artikel"@de . "wetenschappelijk artikel"@nl . "Characterization and optical investigation of BCN film deposited by RF magnetron sputtering"@nl . "Characterization and optical investigation of BCN film deposited by RF magnetron sputtering"@nl . "\u043D\u0430\u0443\u043A\u043E\u0432\u0430 \u0441\u0442\u0430\u0442\u0442\u044F, \u043E\u043F\u0443\u0431\u043B\u0456\u043A\u043E\u0432\u0430\u043D\u0430 \u0432 \u0447\u0435\u0440\u0432\u043D\u0456 2001"@uk . . "10.1016/S0040-6090(01)00904-X" . "I Bello" . . . "Z.F Zhou" . . "M.K Lei" . . . . . . "1-2" . . "C.S Lee" . . . "article scientifique publi\u00E9 en 2001"@fr . "194-199" . .