. "im Februar 2006 ver\u00F6ffentlichter wissenschaftlicher Artikel"@de . . . . . . "1-2" . . "Influence of deposition parameters on surface roughness and mechanical properties of boron carbon nitride coatings synthesized by ion beam assisted deposition"@nl . "Influence of deposition parameters on surface roughness and mechanical properties of boron carbon nitride coatings synthesized by ion beam assisted deposition"@nl . "wetenschappelijk artikel"@nl . . . . . "\u043D\u0430\u0443\u043A\u043E\u0432\u0430 \u0441\u0442\u0430\u0442\u0442\u044F, \u043E\u043F\u0443\u0431\u043B\u0456\u043A\u043E\u0432\u0430\u043D\u0430 \u0432 \u043B\u044E\u0442\u043E\u043C\u0443 2006"@uk . "10.1016/J.TSF.2005.10.070" . "2006-02-01T00:00:00Z"^^ . "210-217" . "Influence of deposition parameters on surface roughness and mechanical properties of boron carbon nitride coatings synthesized by ion beam assisted deposition"@en . . . . . "Koshi Adachi" . . . . "497" . . . . "Influence of deposition parameters on surface roughness and mechanical properties of boron carbon nitride coatings synthesized by ion beam assisted deposition"@nl . "Influence of deposition parameters on surface roughness and mechanical properties of boron carbon nitride coatings synthesized by ion beam assisted deposition"@en . . . . "Influence of deposition parameters on surface roughness and mechanical properties of boron carbon nitride coatings synthesized by ion beam assisted deposition"@en . . "Koji Kato" . . . . "Influence of deposition parameters on surface roughness and mechanical properties of boron carbon nitride coatings synthesized by ion beam assisted deposition"@en . . .