"1692" . . "Low-Temperature Photosensitive Polyimide Processing for Use in 3D Integration Technologies"@en . . . "Low-Temperature Photosensitive Polyimide Processing for Use in 3D Integration Technologies"@en . . . "2014-01-01T00:00:00Z"^^ . . . "im Jahr 2014 ver\u00F6ffentlichter wissenschaftlicher Artikel"@de . . "Klaus D. Lang" . "Low-Temperature Photosensitive Polyimide Processing for Use in 3D Integration Technologies"@nl . . . "10.1557/OPL.2014.520" . . "Low-Temperature Photosensitive Polyimide Processing for Use in 3D Integration Technologies"@nl . . . . . . "\u043D\u0430\u0443\u043A\u043E\u0432\u0430 \u0441\u0442\u0430\u0442\u0442\u044F, \u043E\u043F\u0443\u0431\u043B\u0456\u043A\u043E\u0432\u0430\u043D\u0430 \u0443 2014"@uk . . "wetenschappelijk artikel"@nl . "Low-Temperature Photosensitive Polyimide Processing for Use in 3D Integration Technologies"@en . "Low-Temperature Photosensitive Polyimide Processing for Use in 3D Integration Technologies"@nl . . "Low-Temperature Photosensitive Polyimide Processing for Use in 3D Integration Technologies"@en . .