<http://www.wikidata.org/entity/Q57567423>	<http://www.wikidata.org/prop/direct/P2093>	"Heidi B Cao" .
<http://www.wikidata.org/entity/Q57567423>	<http://www.wikidata.org/prop/P31>	<http://www.wikidata.org/entity/statement/Q57567423-FCB71592-011E-497E-A903-9A577C4DF401> .
<http://www.wikidata.org/entity/Q57567423>	<http://www.wikidata.org/prop/P433>	<http://www.wikidata.org/entity/statement/Q57567423-D1C9240A-FBB0-42A1-87CA-26EB352F550C> .
<http://www.wikidata.org/entity/Q57567423>	<http://www.wikidata.org/prop/P478>	<http://www.wikidata.org/entity/statement/Q57567423-6EEF999E-87F9-49DC-BD33-1F75A230FE12> .
<http://www.wikidata.org/entity/Q57567423>	<http://www.wikidata.org/prop/P1476>	<http://www.wikidata.org/entity/statement/Q57567423-74316307-3B86-4FFE-857E-21C6574D266A> .
<http://www.wikidata.org/entity/Q57567423>	<http://www.w3.org/2004/02/skos/core#prefLabel>	"Line edge roughness of a latent image in post-optical lithography"@en .
<http://www.wikidata.org/entity/Q57567423>	<http://schema.org/description>	"\u0570\u0578\u0564\u057E\u0561\u056E"@hy .
<http://www.wikidata.org/entity/Q57567423>	<http://www.wikidata.org/prop/direct/P698>	"26558555" .
<http://www.wikidata.org/entity/Q57567423>	<http://www.wikidata.org/prop/P2093>	<http://www.wikidata.org/entity/statement/Q57567423-EBD859D2-76B8-44AC-8174-A7940F35798A> .
<http://www.wikidata.org/entity/Q57567423>	<http://www.wikidata.org/prop/P356>	<http://www.wikidata.org/entity/statement/Q57567423-1F2E43C1-A042-4D90-A53B-173F4F8CAC5B> .
<http://www.wikidata.org/entity/Q57567423>	<http://www.wikidata.org/prop/P2093>	<http://www.wikidata.org/entity/statement/Q57567423-7442EF34-275F-4DF8-85DA-1464E55BC547> .
<http://www.wikidata.org/entity/Q57567423>	<http://www.w3.org/2004/02/skos/core#prefLabel>	"Line edge roughness of a latent image in post-optical lithography"@nl .
<http://www.wikidata.org/entity/Q57567423>	<http://schema.org/description>	"im Februar 2006 ver\u00F6ffentlichter wissenschaftlicher Artikel"@de .
<http://www.wikidata.org/entity/Q57567423>	<http://www.wikidata.org/prop/direct-normalized/P698>	<http://rdf.ncbi.nlm.nih.gov/pubchem/reference/26558555> .
<http://www.wikidata.org/entity/Q57567423>	<http://www.wikidata.org/prop/direct/P2093>	"Seiichi Tagawa" .
<http://www.wikidata.org/entity/Q57567423>	<http://www.wikidata.org/prop/direct/P1433>	<http://www.wikidata.org/entity/Q972896> .
<http://www.wikidata.org/entity/Q57567423>	<http://schema.org/name>	"Line edge roughness of a latent image in post-optical lithography"@en .
<http://www.wikidata.org/entity/Q57567423>	<http://www.wikidata.org/prop/direct/P2093>	"Takahiro Kozawa" .
<http://www.wikidata.org/entity/Q57567423>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://wikiba.se/ontology#Item> .
<http://www.wikidata.org/entity/Q57567423>	<http://www.wikidata.org/prop/direct/P356>	"10.1088/0957-4484/17/6/001" .
<http://www.wikidata.org/entity/Q57567423>	<http://www.wikidata.org/prop/P2093>	<http://www.wikidata.org/entity/statement/Q57567423-F204A97D-8139-4721-8F8A-91DCE9392C01> .
<http://www.wikidata.org/entity/Q57567423>	<http://www.wikidata.org/prop/direct/P433>	"6" .
<http://www.wikidata.org/entity/Q57567423>	<http://www.wikidata.org/prop/direct/P478>	"17" .
<http://www.wikidata.org/entity/Q57567423>	<http://schema.org/description>	"article scientifique publi\u00E9 en 2006"@fr .
<http://www.wikidata.org/entity/Q57567423>	<http://schema.org/name>	"Line edge roughness of a latent image in post-optical lithography"@nl .
<http://www.wikidata.org/entity/Q57567423>	<http://www.wikidata.org/prop/P577>	<http://www.wikidata.org/entity/statement/Q57567423-A8AA4E0B-FB72-44D8-88AF-04DBDEDC90A4> .
<http://www.wikidata.org/entity/Q57567423>	<http://schema.org/description>	"article"@en .
<http://www.wikidata.org/entity/Q57567423>	<http://www.wikidata.org/prop/direct/P577>	"2006-02-21T00:00:00Z"^^<http://www.w3.org/2001/XMLSchema#dateTime> .
<http://www.wikidata.org/entity/Q57567423>	<http://www.wikidata.org/prop/direct-normalized/P356>	<http://dx.doi.org/10.1088/0957-4484/17/6/001> .
<http://www.wikidata.org/entity/Q57567423>	<http://www.wikidata.org/prop/P698>	<http://www.wikidata.org/entity/statement/Q57567423-6948E812-B4B0-402A-867E-53EB46AAF182> .
<http://www.wikidata.org/entity/Q57567423>	<http://www.wikidata.org/prop/P304>	<http://www.wikidata.org/entity/statement/Q57567423-1D37CD43-6F53-4D4B-84AB-C520C4BB028C> .
<http://www.wikidata.org/entity/Q57567423>	<http://www.w3.org/2000/01/rdf-schema#label>	"Line edge roughness of a latent image in post-optical lithography"@en .
<http://www.wikidata.org/entity/Q57567423>	<http://www.wikidata.org/prop/P1433>	<http://www.wikidata.org/entity/statement/Q57567423-D257B464-D3C5-488B-90BE-67F73669C886> .
<http://www.wikidata.org/entity/Q57567423>	<http://schema.org/description>	"wetenschappelijk artikel"@nl .
<http://www.wikidata.org/entity/Q57567423>	<http://www.wikidata.org/prop/direct/P31>	<http://www.wikidata.org/entity/Q13442814> .
<http://www.wikidata.org/entity/Q57567423>	<http://www.w3.org/2000/01/rdf-schema#label>	"Line edge roughness of a latent image in post-optical lithography"@nl .
<http://www.wikidata.org/entity/Q57567423>	<http://www.wikidata.org/prop/direct/P1476>	"Line edge roughness of a latent image in post-optical lithography"@en .
<http://www.wikidata.org/entity/Q57567423>	<http://www.wikidata.org/prop/direct/P304>	"1543-1546" .
<http://www.wikidata.org/entity/Q57567423>	<http://schema.org/description>	"\u043D\u0430\u0443\u043A\u043E\u0432\u0430 \u0441\u0442\u0430\u0442\u0442\u044F, \u043E\u043F\u0443\u0431\u043B\u0456\u043A\u043E\u0432\u0430\u043D\u0430 \u0432 \u043B\u044E\u0442\u043E\u043C\u0443 2006"@uk .
<http://www.wikidata.org/entity/Q57567423>	<http://www.wikidata.org/prop/direct/P50>	<http://www.wikidata.org/entity/Q42850611> .
<http://www.wikidata.org/entity/Q57567423>	<http://www.wikidata.org/prop/P50>	<http://www.wikidata.org/entity/statement/Q57567423-CDF06926-DC65-40E3-BB1D-2B1CB5A3CA80> .