"Chloride-Based CVD of 4H-SiC at High Growth Rates on Substrates with Different Off-Angles"@en . . . . . . . . "Chloride-Based CVD of 4H-SiC at High Growth Rates on Substrates with Different Off-Angles"@nl . "\u0570\u0578\u0564\u057E\u0561\u056E \u0570\u0580\u0561\u057F\u0561\u0580\u0561\u056F\u057E\u0561\u056E 2012 \u0569\u057E\u0561\u056F\u0561\u0576\u056B\u0576"@hy . "Chloride-Based CVD of 4H-SiC at High Growth Rates on Substrates with Different Off-Angles"@nl . . "wetenschappelijk artikel"@nl . "Chloride-Based CVD of 4H-SiC at High Growth Rates on Substrates with Different Off-Angles"@en . . "Franziska Christine Beyer" . . . . . . "Chloride-Based CVD of 4H-SiC at High Growth Rates on Substrates with Different Off-Angles"@en . . . "113-116" . . "717-720" . . . "2012-05-01T00:00:00Z"^^ . "Sven Andersson" . "Chloride-Based CVD of 4H-SiC at High Growth Rates on Substrates with Different Off-Angles"@en . . . . "article published in 2012"@en . "article scientifique publi\u00E9 en 2012"@fr . "Chloride-Based CVD of 4H-SiC at High Growth Rates on Substrates with Different Off-Angles"@nl . . . "\u043D\u0430\u0443\u043A\u043E\u0432\u0430 \u0441\u0442\u0430\u0442\u0442\u044F, \u043E\u043F\u0443\u0431\u043B\u0456\u043A\u043E\u0432\u0430\u043D\u0430 \u0432 \u0442\u0440\u0430\u0432\u043D\u0456 2012"@uk . "10.4028/WWW.SCIENTIFIC.NET/MSF.717-720.113" . .