"scholarly article by M. Yazdanfar et al published March 2014 in Journal of Crystal Growth"@en . . . "On the use of methane as a carbon precursor in Chemical Vapor Deposition of silicon carbide"@en . . "On the use of methane as a carbon precursor in Chemical Vapor Deposition of silicon carbide"@nl . . . "\u043D\u0430\u0443\u043A\u043E\u0432\u0430 \u0441\u0442\u0430\u0442\u0442\u044F, \u043E\u043F\u0443\u0431\u043B\u0456\u043A\u043E\u0432\u0430\u043D\u0430 \u0432 \u0431\u0435\u0440\u0435\u0437\u043D\u0456 2014"@uk . "10.1016/J.JCRYSGRO.2013.12.033" . "On the use of methane as a carbon precursor in Chemical Vapor Deposition of silicon carbide"@en . . . . . "390" . "On the use of methane as a carbon precursor in Chemical Vapor Deposition of silicon carbide"@nl . . "P. Sukkaew" . . "On the use of methane as a carbon precursor in Chemical Vapor Deposition of silicon carbide"@nl . . . . "On the use of methane as a carbon precursor in Chemical Vapor Deposition of silicon carbide"@en . . . "M. Yazdanfar" . . . . "article scientifique publi\u00E9 en 2014"@fr . . "wetenschappelijk artikel"@nl . . . "On the use of methane as a carbon precursor in Chemical Vapor Deposition of silicon carbide"@en . . "2014-03-01T00:00:00Z"^^ . "24-29" . . . . . . .