. . . "Matching precursor kinetics to afford a more robust CVD chemistry: a case study of the C chemistry for silicon carbide using SiF4 as Si precursor"@nl . "article scientifique publi\u00E9 en 2017"@fr . . "wetenschappelijk artikel"@nl . "Matching precursor kinetics to afford a more robust CVD chemistry: a case study of the C chemistry for silicon carbide using SiF4 as Si precursor"@en . "2017-01-01T00:00:00Z"^^ . . . "Matching precursor kinetics to afford a more robust CVD chemistry: a case study of the C chemistry for silicon carbide using SiF4 as Si precursor"@en . . . . . . . "Pitsiri Sukkaew" . . . . . . . . "Matching precursor kinetics to afford a more robust CVD chemistry: a case study of the C chemistry for silicon carbide using SiF4 as Si precursor"@nl . . "10.1039/C7TC00138J" . . . . . . . "\u043D\u0430\u0443\u043A\u043E\u0432\u0430 \u0441\u0442\u0430\u0442\u0442\u044F, \u043E\u043F\u0443\u0431\u043B\u0456\u043A\u043E\u0432\u0430\u043D\u0430 \u0443 2017"@uk . . . . . "5818-5823" . . . . . "23" . . . . . . . . . . . "Pontus Stenberg" . "Matching precursor kinetics to afford a more robust CVD chemistry: a case study of the C chemistry for silicon carbide using SiF4 as Si precursor"@en . . "im Jahr 2017 ver\u00F6ffentlichter wissenschaftlicher Artikel"@de . . . . "Matching precursor kinetics to afford a more robust CVD chemistry: a case study of the C chemistry for silicon carbide using SiF4 as Si precursor"@nl . . . "Matching precursor kinetics to afford a more robust CVD chemistry: a case study of the C chemistry for silicon carbide using SiF4 as Si precursor"@en . . "scholarly article by Pontus Stenberg et al published 2017 in Journal of Materials Chemistry C"@en . "5" . .