"12" . . . . "Diffusion of water into SU-8 microcantilevers"@en . "im Januar 2010 ver\u00F6ffentlichter wissenschaftlicher Artikel"@de . . "Diffusion of water into SU-8 microcantilevers"@en . "Daniela Fell" . . . "10577-10583" . . . "Diffusion of water into SU-8 microcantilevers"@en . "Diffusion of water into SU-8 microcantilevers"@nl . . . . "wetenschappelijk artikel"@nl . . . . "Diffusion of water into SU-8 microcantilevers"@nl . . . . . . . "Ying Liu" . "\u043D\u0430\u0443\u043A\u043E\u0432\u0430 \u0441\u0442\u0430\u0442\u0442\u044F, \u043E\u043F\u0443\u0431\u043B\u0456\u043A\u043E\u0432\u0430\u043D\u0430 \u0443 2010"@uk . . "20607179" . . . "35" . "Diffusion of water into SU-8 microcantilevers"@en . . . . "10.1039/C002478C" . . . "Diffusion of water into SU-8 microcantilevers"@nl . . "2010-01-01T00:00:00Z"^^ . . . "Chuanjun Liu" . "Mordechai Sokuler" . . .