<http://www.wikidata.org/entity/Q56057310>	<http://www.wikidata.org/prop/P2093>	<http://www.wikidata.org/entity/statement/Q56057310-F1F33986-0FEF-4AA1-AA46-730A15FC1FA8> .
<http://www.wikidata.org/entity/Q56057310>	<http://schema.org/description>	"\u043D\u0430\u0443\u043A\u043E\u0432\u0430 \u0441\u0442\u0430\u0442\u0442\u044F, \u043E\u043F\u0443\u0431\u043B\u0456\u043A\u043E\u0432\u0430\u043D\u0430 \u0432 1998"@uk .
<http://www.wikidata.org/entity/Q56057310>	<http://www.wikidata.org/prop/P356>	<http://www.wikidata.org/entity/statement/Q56057310-B8BACA08-104C-481F-BA35-0CCA2F7330F3> .
<http://www.wikidata.org/entity/Q56057310>	<http://www.wikidata.org/prop/direct/P577>	"1998-01-01T00:00:00Z"^^<http://www.w3.org/2001/XMLSchema#dateTime> .
<http://www.wikidata.org/entity/Q56057310>	<http://www.wikidata.org/prop/P577>	<http://www.wikidata.org/entity/statement/Q56057310-A4B8367C-5FF4-439C-9AF1-DF04E5AEB2CB> .
<http://www.wikidata.org/entity/Q56057310>	<http://www.wikidata.org/prop/P304>	<http://www.wikidata.org/entity/statement/Q56057310-B60F26D3-0DDE-41E9-A1DC-6CD2190A279E> .
<http://www.wikidata.org/entity/Q56057310>	<http://www.wikidata.org/prop/P2093>	<http://www.wikidata.org/entity/statement/Q56057310-B51D121D-B063-459D-A83F-6CC268CD9D4B> .
<http://www.wikidata.org/entity/Q56057310>	<http://www.wikidata.org/prop/P31>	<http://www.wikidata.org/entity/statement/Q56057310-CD0B51CF-241B-474B-B3E9-2459D161737F> .
<http://www.wikidata.org/entity/Q56057310>	<http://schema.org/name>	"Bulk micromachining of silicon"@nl .
<http://www.wikidata.org/entity/Q56057310>	<http://www.wikidata.org/prop/direct/P304>	"1536-1551" .
<http://www.wikidata.org/entity/Q56057310>	<http://www.wikidata.org/prop/direct/P356>	"10.1109/5.704259" .
<http://www.wikidata.org/entity/Q56057310>	<http://schema.org/description>	"scholarly article by G.T.A. Kovacs et al published 1998 in Proceedings of the IEEE"@en .
<http://www.wikidata.org/entity/Q56057310>	<http://www.wikidata.org/prop/P5875>	<http://www.wikidata.org/entity/statement/Q56057310-F7A9A762-2F4C-4E9A-91DB-AD3BA2294F38> .
<http://www.wikidata.org/entity/Q56057310>	<http://www.w3.org/2004/02/skos/core#prefLabel>	"Bulk micromachining of silicon"@nl .
<http://www.wikidata.org/entity/Q56057310>	<http://www.wikidata.org/prop/direct/P2093>	"K.E. Petersen" .
<http://www.wikidata.org/entity/Q56057310>	<http://www.wikidata.org/prop/direct/P2093>	"G.T.A. Kovacs" .
<http://www.wikidata.org/entity/Q56057310>	<http://www.wikidata.org/prop/direct-normalized/P356>	<http://dx.doi.org/10.1109/5.704259> .
<http://www.wikidata.org/entity/Q56057310>	<http://www.wikidata.org/prop/direct/P433>	"8" .
<http://www.wikidata.org/entity/Q56057310>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://wikiba.se/ontology#Item> .
<http://www.wikidata.org/entity/Q56057310>	<http://www.wikidata.org/prop/direct/P1476>	"Bulk micromachining of silicon"@en .
<http://www.wikidata.org/entity/Q56057310>	<http://schema.org/name>	"Bulk micromachining of silicon"@en .
<http://www.wikidata.org/entity/Q56057310>	<http://www.wikidata.org/prop/P1433>	<http://www.wikidata.org/entity/statement/Q56057310-36CA27B3-D7F6-44C2-87D0-7BD96AC07653> .
<http://www.wikidata.org/entity/Q56057310>	<http://www.wikidata.org/prop/P478>	<http://www.wikidata.org/entity/statement/Q56057310-4DC89577-98DB-4E38-B402-D064E51667DE> .
<http://www.wikidata.org/entity/Q56057310>	<http://www.w3.org/2004/02/skos/core#prefLabel>	"Bulk micromachining of silicon"@en .
<http://www.wikidata.org/entity/Q56057310>	<http://www.wikidata.org/prop/direct/P2093>	"N.I. Maluf" .
<http://www.wikidata.org/entity/Q56057310>	<http://www.wikidata.org/prop/P433>	<http://www.wikidata.org/entity/statement/Q56057310-EF291B0A-8EAC-4838-B905-7AA9A0E18717> .
<http://www.wikidata.org/entity/Q56057310>	<http://www.w3.org/2000/01/rdf-schema#label>	"Bulk micromachining of silicon"@nl .
<http://www.wikidata.org/entity/Q56057310>	<http://www.wikidata.org/prop/direct/P1433>	<http://www.wikidata.org/entity/Q3021749> .
<http://www.wikidata.org/entity/Q56057310>	<http://schema.org/description>	"wetenschappelijk artikel"@nl .
<http://www.wikidata.org/entity/Q56057310>	<http://www.wikidata.org/prop/direct/P478>	"86" .
<http://www.wikidata.org/entity/Q56057310>	<http://www.w3.org/2000/01/rdf-schema#label>	"Bulk micromachining of silicon"@en .
<http://www.wikidata.org/entity/Q56057310>	<http://www.wikidata.org/prop/P2093>	<http://www.wikidata.org/entity/statement/Q56057310-C5966FC8-2518-4CD6-80B5-441EF4168809> .
<http://www.wikidata.org/entity/Q56057310>	<http://www.wikidata.org/prop/direct/P921>	<http://www.wikidata.org/entity/Q670> .
<http://www.wikidata.org/entity/Q56057310>	<http://www.wikidata.org/prop/P1476>	<http://www.wikidata.org/entity/statement/Q56057310-9E328F0A-BDC5-4B14-A905-51EC6AFE9984> .
<http://www.wikidata.org/entity/Q56057310>	<http://www.wikidata.org/prop/P921>	<http://www.wikidata.org/entity/statement/Q56057310-0A2682DF-02D5-43C3-B701-517E87D6CBA7> .
<http://www.wikidata.org/entity/Q56057310>	<http://schema.org/description>	"im Januar 1998 ver\u00F6ffentlichter wissenschaftlicher Artikel"@de .
<http://www.wikidata.org/entity/Q56057310>	<http://www.wikidata.org/prop/direct/P5875>	"2985398" .
<http://www.wikidata.org/entity/Q56057310>	<http://www.wikidata.org/prop/direct/P31>	<http://www.wikidata.org/entity/Q13442814> .