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scientific article published on 01 January 2018 научна статия artikull shkencor i botuar më 01 janar 2018 artículo científico publicado en 2018 article scientifique (publié 2018) wetenschappelijk artikel artículu científicu espublizáu en xineru de 2018 articolo scientifico (pubblicato il 2018) artigo científico (publicado na 2018) наукова стаття, опублікована 1 січня 2018 im Januar 2018 veröffentlichter wissenschaftlicher Artikel
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B D Hoskins J S Villarrubia A E Vladár
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Electron beam-based metrology after CMOS Electron beam-based metrology after CMOS Electron beam-based metrology after CMOS
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Electron beam-based metrology after CMOS
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