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article scientifique publié en 2000 наукова стаття, опублікована в грудні 2000 scholarly article by Jun-Ying Zhang et al published December 2000 in Applied Surface Science wetenschappelijk artikel
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2000-12-01T00:00:00Z
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Z. Geretovszky B. Hopp Jun-Ying Zhang Ian W. Boyd
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Photo-deposition of tantalum pentoxide film using 222 nm excimer lamps Photo-deposition of tantalum pentoxide film using 222 nm excimer lamps
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Photo-deposition of tantalum pentoxide film using 222 nm excimer lamps Photo-deposition of tantalum pentoxide film using 222 nm excimer lamps
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Photo-deposition of tantalum pentoxide film using 222 nm excimer lamps Photo-deposition of tantalum pentoxide film using 222 nm excimer lamps
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Photo-deposition of tantalum pentoxide film using 222 nm excimer lamps
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10.1016/S0169-4332(00)00768-6