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наукова стаття, опублікована в березні 2003 im März 2003 veröffentlichter wissenschaftlicher Artikel article scientifique publié en 2003 wetenschappelijk artikel scholarly article by Q. Fang et al published March 2003 in Thin Solid Films
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2003-03-01T00:00:00Z
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Z.M. Wang P.K. Hurley Q. Fang J.-P. Senateur Ian W. Boyd J.-Y. Zhang J.X. Wu T.L. Leedham M.A. Audier H. Davies B.J. O'Sullivan C. Jimenez
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Interface of tantalum oxide films on silicon by UV annealing at low temperature Interface of tantalum oxide films on silicon by UV annealing at low temperature
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Interface of tantalum oxide films on silicon by UV annealing at low temperature Interface of tantalum oxide films on silicon by UV annealing at low temperature
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Interface of tantalum oxide films on silicon by UV annealing at low temperature Interface of tantalum oxide films on silicon by UV annealing at low temperature
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Interface of tantalum oxide films on silicon by UV annealing at low temperature
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248-252
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10.1016/S0040-6090(02)01280-4