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Namespace Prefixes

PrefixIRI
wdthttp://www.wikidata.org/prop/direct/
wdtnhttp://www.wikidata.org/prop/direct-normalized/
n9http://dx.doi.org/10.1063/
schemahttp://schema.org/
rdfshttp://www.w3.org/2000/01/rdf-schema#
skoshttp://www.w3.org/2004/02/skos/core#
wikibasehttp://wikiba.se/ontology#
phttp://www.wikidata.org/prop/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
xsdhhttp://www.w3.org/2001/XMLSchema#
wdshttp://www.wikidata.org/entity/statement/
wdhttp://www.wikidata.org/entity/

Statements

Subject Item
wd:Q62642587
rdf:type
wikibase:Item
schema:description
wetenschappelijk artikel im Dezember 2012 veröffentlichter wissenschaftlicher Artikel наукова стаття, опублікована в грудні 2012
p:P577
wds:Q62642587-85AD2E7F-5969-49FD-AAE5-7AF3FEB221FB
wdt:P577
2012-12-01T00:00:00Z
p:P2093
wds:Q62642587-4F16E45F-90F0-4270-AD3A-44A3036C19D4 wds:Q62642587-30F5085B-1967-4A15-A98F-652242FF8A29 wds:Q62642587-9F1330B3-1AEB-4384-99B5-FC6F01ED8F8B wds:Q62642587-F249E4DD-F82A-4C60-A16C-74BDA016638F wds:Q62642587-2C148215-59CE-4207-B64B-F7D43D73F283 wds:Q62642587-93E6827C-107C-43B8-9C2A-4379EA4A7001 wds:Q62642587-551CFAF3-6298-4EBE-896D-EA36E505DD78
wdt:P2093
H. Yoshikawa Y. S. Uritsky Y. Yamashita K. Kobayashi G. Conti C. S. Fadley S. Ueda
rdfs:label
Nondestructive characterization of a TiN metal gate: Chemical and structural properties by means of standing-wave hard x-ray photoemission spectroscopy Nondestructive characterization of a TiN metal gate: Chemical and structural properties by means of standing-wave hard x-ray photoemission spectroscopy
skos:prefLabel
Nondestructive characterization of a TiN metal gate: Chemical and structural properties by means of standing-wave hard x-ray photoemission spectroscopy Nondestructive characterization of a TiN metal gate: Chemical and structural properties by means of standing-wave hard x-ray photoemission spectroscopy
schema:name
Nondestructive characterization of a TiN metal gate: Chemical and structural properties by means of standing-wave hard x-ray photoemission spectroscopy Nondestructive characterization of a TiN metal gate: Chemical and structural properties by means of standing-wave hard x-ray photoemission spectroscopy
p:P50
wds:Q62642587-202FBC49-4F4E-41EC-AD73-C9484449C720 wds:Q62642587-2C90242E-9ABD-4295-9954-27F219E011A3
wdt:P50
wd:Q56487401 wd:Q51538251
p:P1476
wds:Q62642587-232CAF64-F570-49D5-A67B-957546EE7926
wdt:P1476
Nondestructive characterization of a TiN metal gate: Chemical and structural properties by means of standing-wave hard x-ray photoemission spectroscopy
p:P304
wds:Q62642587-FD2FC07A-69F3-4D1A-9E86-9E0FB1952F25
wdt:P304
114501
p:P31
wds:Q62642587-8726EAC5-35CB-4605-BF22-5586D677D9A5
wdt:P31
wd:Q13442814
p:P1433
wds:Q62642587-22D4D92E-AA0E-4461-857B-A3499CE2652B
wdt:P1433
wd:Q1987941
p:P433
wds:Q62642587-1C4F800F-2E55-4BCC-AD61-85EE65633012
p:P478
wds:Q62642587-3CA06DCC-7855-4AE3-B05C-4C0CB6FA45FB
wdt:P433
11
wdt:P478
112
p:P356
wds:Q62642587-121465C2-F0BE-420F-B830-8C1D40F5BAD8
wdtn:P356
n9:1.4765720
wdt:P356
10.1063/1.4765720