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im Dezember 2005 veröffentlichter wissenschaftlicher Artikel article scientifique publié en 2005 наукова стаття, опублікована в грудні 2005 wetenschappelijk artikel
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2005-12-01T00:00:00Z
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J.E. Rubio F. Benistant K.R.C. Mok M.P. Srinivasan
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Comprehensive modeling of ion-implant amorphization in silicon Comprehensive modeling of ion-implant amorphization in silicon
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Comprehensive modeling of ion-implant amorphization in silicon Comprehensive modeling of ion-implant amorphization in silicon
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Comprehensive modeling of ion-implant amorphization in silicon Comprehensive modeling of ion-implant amorphization in silicon
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Comprehensive modeling of ion-implant amorphization in silicon
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383-385
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124-125
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n11:J.MSEB.2005.08.026
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10.1016/J.MSEB.2005.08.026