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наукова стаття, опублікована у вересні 2001 artículu científicu wetenschappelijk artikel article article scientifique publié en 2001 im September 2001 veröffentlichter wissenschaftlicher Artikel
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2001-09-01T00:00:00Z
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B Stannowski R.E.I Schropp J.K Rath
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Hot-wire silicon nitride for thin-film transistors Hot-wire silicon nitride for thin-film transistors
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Hot-wire silicon nitride for thin-film transistors Hot-wire silicon nitride for thin-film transistors
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Hot-wire silicon nitride for thin-film transistors Hot-wire silicon nitride for thin-film transistors
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Hot-wire silicon nitride for thin-film transistors
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339-342
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10.1016/S0040-6090(01)01291-3