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article scientifique publié en 2005 article im Oktober 2005 veröffentlichter wissenschaftlicher Artikel наукова стаття, опублікована в жовтні 2005 wetenschappelijk artikel
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2005-10-17T00:00:00Z
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Simon Rast Urs Gysin Christoph Gerber Dong-Weon Lee Michel Despont Jung-Ho Kang
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Fabrication and evaluation of single-crystal silicon cantilevers with ultra-low spring constants Fabrication and evaluation of single-crystal silicon cantilevers with ultra-low spring constants
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Fabrication and evaluation of single-crystal silicon cantilevers with ultra-low spring constants Fabrication and evaluation of single-crystal silicon cantilevers with ultra-low spring constants
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Fabrication and evaluation of single-crystal silicon cantilevers with ultra-low spring constants Fabrication and evaluation of single-crystal silicon cantilevers with ultra-low spring constants
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Fabrication and evaluation of single-crystal silicon cantilevers with ultra-low spring constants
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