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article scientifique publié en juillet 2001 im Juli 2001 veröffentlichter wissenschaftlicher Artikel наукова стаття, опублікована в липні 2001 wetenschappelijk artikel
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2001-07-01T00:00:00Z
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L. Guimarães A. Cabrita E. Fortunato R. Martins P. Tonello V. Silva
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New nanostructured silicon films grown by PECVD technique under controlled powder formation conditions New nanostructured silicon films grown by PECVD technique under controlled powder formation conditions
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New nanostructured silicon films grown by PECVD technique under controlled powder formation conditions New nanostructured silicon films grown by PECVD technique under controlled powder formation conditions
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New nanostructured silicon films grown by PECVD technique under controlled powder formation conditions New nanostructured silicon films grown by PECVD technique under controlled powder formation conditions
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New nanostructured silicon films grown by PECVD technique under controlled powder formation conditions
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10.1016/S0038-092X(01)00060-3