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rdf:type
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description
| - article (en)
- wetenschappelijk artikel (nl)
- наукова стаття, опублікована у квітні 2002 (uk)
- article scientifique publié en 2002 (fr)
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publication date
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publication date
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cites work
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cites work
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author name string
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author name string
| - W. Richter
- M. Zorn
- A. Kaluza
- J.-T. Zettler
- K. Haberland
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rdfs:label
| - Real-time calibration of wafer temperature, growth rate and composition by optical in-situ techniques during AlxGa1−xAs growth in MOVPE (en)
- Real-time calibration of wafer temperature, growth rate and composition by optical in-situ techniques during AlxGa1−xAs growth in MOVPE (nl)
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skos:prefLabel
| - Real-time calibration of wafer temperature, growth rate and composition by optical in-situ techniques during AlxGa1−xAs growth in MOVPE (en)
- Real-time calibration of wafer temperature, growth rate and composition by optical in-situ techniques during AlxGa1−xAs growth in MOVPE (nl)
|
name
| - Real-time calibration of wafer temperature, growth rate and composition by optical in-situ techniques during AlxGa1−xAs growth in MOVPE (en)
- Real-time calibration of wafer temperature, growth rate and composition by optical in-situ techniques during AlxGa1−xAs growth in MOVPE (nl)
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author
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author
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title
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title
| - Real-time calibration of wafer temperature, growth rate and composition by optical in-situ techniques during AlxGa1−xAs growth in MOVPE (en)
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page(s)
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page(s)
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instance of
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instance of
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published in
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published in
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issue
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volume
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issue
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volume
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DOI
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DOI
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DOI
| - 10.1016/S0022-0248(02)00910-7
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is about
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