About: Effects of additive elements on the phase formation and morphological stability of nickel monosilicide films

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scholarly article by C. Lavoie et al published November 2006 in Microelectronic Engineering

Attributes	Values
rdf:type	Item
description	wetenschappelijk artikel (nl) наукова стаття, опублікована в листопаді 2006 (uk) scholarly article by C. Lavoie et al published November 2006 in Microelectronic Engineering (en)
publication date	wds:Q57641451-763660C8-21A0-417E-8A62-BC24950FE029
publication date	2006-11-01 00:00:00Z (xsd:dateTime)
author name string	wds:Q57641451-1494737B-60BF-4216-BBAC-6B2A3C35E59A wds:Q57641451-1EEE6FD3-D3B9-4DB7-A038-48D42623A88D wds:Q57641451-5979B464-C435-42E4-A806-58E4046E00E8 wds:Q57641451-663EE0C3-1522-4F67-82E4-C8E22D3ECFBF wds:Q57641451-6B12BCEF-CC04-4E54-8BFC-02BC27F69BB9 wds:Q57641451-7B9D53BF-F2E6-468B-AEAC-A11712F6B8A7 wds:Q57641451-ABC3485D-36D4-45BC-8480-CC996278F40A
author name string	C. Lavoie C. Cabral C. Detavernier J. Jordan-Sweet J.M.E. Harper A.J. Kellock F.M. d’Heurle
rdfs:label	Effects of additive elements on the phase formation and morphological stability of nickel monosilicide films (en) Effects of additive elements on the phase formation and morphological stability of nickel monosilicide films (nl)
skos:prefLabel	Effects of additive elements on the phase formation and morphological stability of nickel monosilicide films (en) Effects of additive elements on the phase formation and morphological stability of nickel monosilicide films (nl)
name	Effects of additive elements on the phase formation and morphological stability of nickel monosilicide films (en) Effects of additive elements on the phase formation and morphological stability of nickel monosilicide films (nl)
title	wds:Q57641451-9486F813-05E3-4046-B17C-DD6AFF11029D
title	Effects of additive elements on the phase formation and morphological stability of nickel monosilicide films (en)
page(s)	wds:Q57641451-EEC4A2EC-2697-4A64-B16F-F65F89776F77
page(s)	2042-2054
instance of	wds:Q57641451-D38443D0-9756-4547-882F-33123280D9AC wds:Q57641451-E7093A8C-0092-4870-974C-90BC7FA79C09
instance of	review article scholarly article
main subject	wds:Q57641451-a655b409-d062-4c49-bfc4-30b14e78a7f9
main subject	nickel
published in	wds:Q57641451-5D8C2B30-697B-45D7-9F68-2160426B3702
published in	Microelectronic Engineering
issue	wds:Q57641451-A0274167-8216-4936-B592-4A6FF2B62D58
volume	wds:Q57641451-00FEAAF1-0D35-4301-88B0-5BAA5C7A2444
issue	11-12
volume	83
DOI	wds:Q57641451-BCC31578-1A3D-4197-8B2E-F040D1C8DE28
DOI	http://dx.doi.org/10.1016/J.MEE.2006.09.006
DOI	10.1016/J.MEE.2006.09.006
is about of	https://www.wikidata.org/wiki/Special:EntityData/Q57641451
is cites work of	In-situ study of growth of carbon nanotube forests on conductive CoSi2 support Impact of laser anneal on NiPt silicide texture and chemical composition Texture in thin film silicides and germanides: A review Formation and morphological stability of NiSi in the presence of W, Ti, and Ta alloying elements In situ study of the formation of silicide phases in amorphous Ni–Si mixed layers Influence of a transient hexagonal phase on the microstructure and morphological stability of NiSi films The role of lattice mismatch and kinetics in texture development: Co1−xNixSi2 thin films on Si(100) Formation of Nickel Silicide from Direct-Liquid-Injection Chemical-Vapor-Deposited Nickel Nitride Films Nucleation and diffusion during growth of ternary Co1−xNixSi2 thin films studied by complementary techniques in real time Atomic-scale redistribution of Pt during reactive diffusion in Ni (5% Pt)-Si contacts.
is cites work of	wds:Q57641136-FC513FBD-9D07-463A-A707-97186E6AB409 wds:Q57641406-68024F33-2EDB-494E-BD4D-9F78F36E8428 wds:Q56559761-8AC2895B-377D-48BB-B225-C7C7CB1640AC wds:Q57641275-53930E4D-26FC-4682-9BBB-F0B9944150CD wds:Q33425553-2D89CAEC-A573-482F-A4BE-E942D1043695 wds:Q57641336-B66EA932-0F0E-44CF-ABFF-D1561F4F1908 wds:Q57641390-6237952E-E890-48BF-86C7-421F5A410522 wds:Q57641418-7CACA041-4800-469E-9C6E-EBD0CA6EA42A wds:Q57641343-28D458B4-D64B-4E9C-AE6B-277892C4ADEE wds:Q57641162-5C3C5B45-483D-40DB-8E14-CC8C5C07F25F

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