About: Atomic layer deposition of Al2O3, ZrO2, Ta2O5, and Nb2O5 based nanolayered dielectrics

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About: Atomic layer deposition of Al2O3, ZrO2, Ta2O5, and Nb2O5 based nanolayered dielectrics Goto Sponge NotDistinct Permalink

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rdf:type	Item
description	wetenschappelijk artikel (nl) наукова стаття, опублікована в травні 2002 (uk) article scientifique publié en 2002 (fr) im Mai 2002 veröffentlichter wissenschaftlicher Artikel (de)
publication date	wds:Q57398018-D302B073-CC7C-4EF1-8CC1-C9F660749C27
publication date	2002-05-01 00:00:00Z (xsd:dateTime)
author name string	wds:Q57398018-5B9BFA2E-8AA8-4D4D-9448-5D5C167A1740 wds:Q57398018-C80430DD-72F3-4B9F-9504-F07F904BCFB2 wds:Q57398018-F9DD5A29-AF8B-469B-9E52-07BAA02CE1C5
author name string	Juhani Keinonen Lata Prabhu Sandeep Bagchi
rdfs:label	Atomic layer deposition of Al2O3, ZrO2, Ta2O5, and Nb2O5 based nanolayered dielectrics (en) Atomic layer deposition of Al2O3, ZrO2, Ta2O5, and Nb2O5 based nanolayered dielectrics (nl)
skos:prefLabel	Atomic layer deposition of Al2O3, ZrO2, Ta2O5, and Nb2O5 based nanolayered dielectrics (en) Atomic layer deposition of Al2O3, ZrO2, Ta2O5, and Nb2O5 based nanolayered dielectrics (nl)
name	Atomic layer deposition of Al2O3, ZrO2, Ta2O5, and Nb2O5 based nanolayered dielectrics (en) Atomic layer deposition of Al2O3, ZrO2, Ta2O5, and Nb2O5 based nanolayered dielectrics (nl)
author	wds:Q57398018-9A12D2E4-807A-4283-83DA-5947B735DB58 wds:Q57398018-CF4D9034-4EAE-4A27-B80A-DFB54E228767 wds:Q57398018-E3429134-9753-4B66-8F61-E075C37D3A65 wds:Q57398018-F66BF3CD-9C1C-4941-B7DF-4951C4365C3A wds:Q57398018-FCBA6E2D-8981-4BBF-AF85-F3F35B0E4096
author	Markku Leskela Mikko Ritala Timo Sajavaara David Gilmer Kaupo Kukli
title	wds:Q57398018-F52D8E44-3625-4AA3-8E96-D79099CA5B2E
title	Atomic layer deposition of Al2O3, ZrO2, Ta2O5, and Nb2O5 based nanolayered dielectrics (en)
page(s)	wds:Q57398018-5C48F2A6-E11C-4AFE-BDCB-3A83020F646C
page(s)	35-39
instance of	wds:Q57398018-4372BD58-59DC-4D04-A798-8C1B6389339F
instance of	scholarly article
published in	wds:Q57398018-F934EAB6-E229-4B7B-96FD-75DDF7BB4810
published in	Journal of Non-Crystalline Solids
issue	wds:Q57398018-46D0CE7B-503B-4792-83DA-B588F542677B
volume	wds:Q57398018-F20A4C98-4C67-4A2B-953E-D909D95061D3
issue	1
volume	303
DOI	wds:Q57398018-07AB4B7F-6DFB-4429-8E91-B57B004F99B0
DOI	http://dx.doi.org/10.1016/S0022-3093(02)00961-4
DOI	10.1016/S0022-3093(02)00961-4
is about of	https://www.wikidata.org/wiki/Special:EntityData/Q57398018
is cites work of	Field effect sensors for nucleic Acid detection: recent advances and future perspectives
is cites work of	wds:Q38462373-354F3867-B11C-452C-91CA-28F555B0EE1B

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