About: Self-Replication of Deeply Buried Doped Silicon Structures, which Remotely Control the Etching Process: A New Method for Forming a Silicon Pattern from the Bottom Up

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About: Self-Replication of Deeply Buried Doped Silicon Structures, which Remotely Control the Etching Process: A New Method for Forming a Silicon Pattern from the Bottom Up Goto Sponge NotDistinct Permalink

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scientific article from 2021

Attributes	Values
rdf:type	Item
description	wetenschappelijk artikel (nl) article scientifique publié en 2021 (fr) наукова стаття, опублікована у 2021 (uk) scientific article from 2021 (en)
publication date	wds:Q108004206-8E93A46E-69DA-47A3-A6AA-630BD8B2ABDE
publication date	2021-06-01 00:00:00Z (xsd:dateTime)
author name string	wds:Q108004206-BE8F4036-AF9E-4781-8429-B09638EAEAAA
author name string	Christopher Schutzeichel
rdfs:label	Self-Replication of Deeply Buried Doped Silicon Structures, which Remotely Control the Etching Process: A New Method for Forming a Silicon Pattern from the Bottom Up (en) Self-Replication of Deeply Buried Doped Silicon Structures, which Remotely Control the Etching Process: A New Method for Forming a Silicon Pattern from the Bottom Up (nl)
skos:prefLabel	Self-Replication of Deeply Buried Doped Silicon Structures, which Remotely Control the Etching Process: A New Method for Forming a Silicon Pattern from the Bottom Up (en) Self-Replication of Deeply Buried Doped Silicon Structures, which Remotely Control the Etching Process: A New Method for Forming a Silicon Pattern from the Bottom Up (nl)
name	Self-Replication of Deeply Buried Doped Silicon Structures, which Remotely Control the Etching Process: A New Method for Forming a Silicon Pattern from the Bottom Up (en) Self-Replication of Deeply Buried Doped Silicon Structures, which Remotely Control the Etching Process: A New Method for Forming a Silicon Pattern from the Bottom Up (nl)
author	wds:Q108004206-192AB1BB-FD61-4756-84AB-1BCA5A934478 wds:Q108004206-5A2FE150-8D80-4961-AE7A-78A4C7B5F7CA wds:Q108004206-E7CB4E20-135C-4AE7-BAFE-225ABB17188A
author	Brigitte Voit Anton Kiriy Nataliya Kiriy
title	wds:Q108004206-DA80831D-9E9D-421C-835B-915B2D77932B
title	Self-Replication of Deeply Buried Doped Silicon Structures, which Remotely Control the Etching Process: A New Method for Forming a Silicon Pattern from the Bottom Up (en)
page(s)	wds:Q108004206-70524A24-93C3-45FC-B352-6FCEFCDC27F7
page(s)	2100105
instance of	wds:Q108004206-215F0108-18C6-4D99-80EF-170BCD74EF12
instance of	scholarly article
published in	wds:Q108004206-22103233-984E-4E11-B0A8-EAF08EBA9237
published in	Advanced Functional Materials
issue	wds:Q108004206-F2EED1DD-8338-4DA5-94A0-926959E545C9
volume	wds:Q108004206-C2921460-D27C-4325-84F3-3CD6BD30B3D6
issue	25
volume	31
DOI	wds:Q108004206-95DCE859-F43F-4DDF-B2AC-5EB1104446CC
DOI	http://dx.doi.org/10.1002/ADFM.202100105
DOI	10.1002/ADFM.202100105
is about of	https://www.wikidata.org/wiki/Special:EntityData/Q108004206

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