About: Substrate engineering by hydrogen or helium implantation for epitaxial growth of lattice mismatched Si/sub 1-x/Ge/sub x/ films on silicon

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About: Substrate engineering by hydrogen or helium implantation for epitaxial growth of lattice mismatched Si/sub 1-x/Ge/sub x/ films on silicon Goto Sponge NotDistinct Permalink

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rdf:type	Item
description	wetenschappelijk artikel (nl) наукова стаття (uk) article scientifique (fr)
author name string	wds:Q59510082-110E8433-BA06-4002-BB0E-AE1FFD699F4D wds:Q59510082-2617E391-7222-4F2E-B534-23B9E302CB0E wds:Q59510082-356161DC-6AFE-448A-9BD3-6164320CD05B wds:Q59510082-60EDE064-F6BC-42DA-B270-43A0EC3EB00F wds:Q59510082-67C8F788-F6F8-4C7A-8474-925F7CAFD18C wds:Q59510082-C480CEB3-C7C2-48D2-B039-49BF9865DB19 wds:Q59510082-EF3076E8-0F68-41F1-BA65-888D49E79BF4 wds:Q59510082-F6004F5E-962F-482D-A673-AA7C4F48A6AA
author name string	D. Kirch S. Mantl B. Hollander H. Trinkaus H.-J. Herzog P.F.P. Fichtner St. Lenk T. Hackbarth
rdfs:label	Substrate engineering by hydrogen or helium implantation for epitaxial growth of lattice mismatched Si/sub 1-x/Ge/sub x/ films on silicon (en) Substrate engineering by hydrogen or helium implantation for epitaxial growth of lattice mismatched Si/sub 1-x/Ge/sub x/ films on silicon (nl)
skos:prefLabel	Substrate engineering by hydrogen or helium implantation for epitaxial growth of lattice mismatched Si/sub 1-x/Ge/sub x/ films on silicon (en) Substrate engineering by hydrogen or helium implantation for epitaxial growth of lattice mismatched Si/sub 1-x/Ge/sub x/ films on silicon (nl)
name	Substrate engineering by hydrogen or helium implantation for epitaxial growth of lattice mismatched Si/sub 1-x/Ge/sub x/ films on silicon (en) Substrate engineering by hydrogen or helium implantation for epitaxial growth of lattice mismatched Si/sub 1-x/Ge/sub x/ films on silicon (nl)
author	wds:Q59510082-40F19FAB-E8D3-493F-879D-4B1F0309B631 wds:Q59510082-F14B23C9-DCB3-4AF4-ADD1-4AE0C1831499
author	Martina Luysberg Paulo F P Fichtner
title	wds:Q59510082-345A2BE9-1F9D-431E-A486-8B6F38FA5EE0
title	Substrate engineering by hydrogen or helium implantation for epitaxial growth of lattice mismatched Si/sub 1-x/Ge/sub x/ films on silicon (en)
instance of	wds:Q59510082-FD12C7FC-785E-49C5-A42F-6CEA133A95CB
instance of	scholarly article
DOI	wds:Q59510082-2BDAEE41-3BF7-4609-B25E-2D92970106EF
DOI	http://dx.doi.org/10.1109/.2000.924154
DOI	10.1109/.2000.924154
is about of	https://www.wikidata.org/wiki/Special:EntityData/Q59510082

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