About: Flow of PECVD Oxide Films Doped with POCl[sub 3]     Goto   Sponge   NotDistinct   Permalink

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AttributesValues
rdf:type
description
  • wetenschappelijk artikel (nl)
  • наукова стаття, опублікована в 1991 (uk)
  • article scientifique publié en 1991 (fr)
  • im Januar 1991 veröffentlichter wissenschaftlicher Artikel (de)
publication date
publication date
rdfs:label
  • Flow of PECVD Oxide Films Doped with POCl[sub 3] (en)
  • Flow of PECVD Oxide Films Doped with POCl[sub 3] (nl)
skos:prefLabel
  • Flow of PECVD Oxide Films Doped with POCl[sub 3] (en)
  • Flow of PECVD Oxide Films Doped with POCl[sub 3] (nl)
name
  • Flow of PECVD Oxide Films Doped with POCl[sub 3] (en)
  • Flow of PECVD Oxide Films Doped with POCl[sub 3] (nl)
author
author
title
title
  • Flow of PECVD Oxide Films Doped with POCl[sub 3] (en)
page(s)
page(s)
  • 181
instance of
instance of
published in
published in
issue
volume
issue
  • 1
volume
  • 138
DOI
DOI
DOI
  • 10.1149/1.2085533
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